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Gasonics
Ref :
1831172-9-GO
Condition :
Used
Manufacturer :
Gasonics
Model :
-
Year(s) :
-
Quantity :
0
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
07 Jun. 2018
Gasonics Aura 2000LL
*8¿ Cassette to Cassette Single Wafer Etcher
*Configured for 8¿ wafers
*Downstream microwave process
*Loadlock with cool-down station for processed wafer
*Water cooled chamber and lamp assembly
*Downstream endpoint detection