KLA-Tencor P-10 Surface Profiler

1x, KLA-Tencor P-10 Surface Profiler

A computerized, highly sensitive surface profiler
that measures roughness, waviness, step height
and other surface characteristics in a variety of applications.

Features:
A series of traces can merged to create a 3D topographic image
of the surface.
Measures complex aluminum and tungsten multilayer
metallization schemes such as TiN/AI/TiN or W/TiN
Realistic process control by measuring actual product wafers
Three-dimensional and selected two-dimensional data display
Specifications:
Sample size: up to 200mm
Low force head: 0.05 - 15mg
0.05mg resolution
Step heigh repeatability, 0.001µm max. in the 13µm range
0.005µm max in the 130µm range
Scan length: 150mm
Scan speed: 1µm/sec to 25mm/sec
Scan sampling rates: 50, 100, 200, 500, 1000Hz
Vertical range:
at 0.008Å resolution: ±6.5µm
at 0.8Å resolutions: ±65µm
at 0.6Å resolutions: ±1000µm
Horizontal resolution at 1µm/sec scan speed: 0.01µm
Angle resolution: 0.001°