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MPT RTP-3000

Ref : 2117919-9-A
Condition : Used
Manufacturer : MPT
Model : RTP-3000
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

FEATURES
Dual-Arm Robot Transport
Dual Cassette Platform
Quartz Processing Chamber
Quartz Wafer Processing Tray
Four-layer Tungsten Halogen Lamp Array Heating
Zone Control with unique lamp arrangement ensures highly uniform heating of up to 12″ Silicon Wafers (300mm chamber) or 8″ Silicon Wafers / 6” GaAs Wafers with 8″ O.D. Susceptor (200mm chamber)
Extended Range Pyrometer Plus (ERP+) internally cooled pyrometer for extended temperature range from 350 – 1250 Degrees C
Electro polished stainless steel (316L) gas plumbing with VCR Connectors
MFC controlled gas lines, up to ten (10) gas lines available.

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