Menu

Nikon 4425i

Ref : 2242633-9
Condition : Used
Manufacturer : Nikon
Model : 4425i
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Configuration
Wafer size: 6” (GaN)
Wavelength: i-line (365 nm)
Minimum resolution: ≤ 0.7 μm
Projection ratio: 2.5: 1 or 5: 1
Alignment accuracy: ≤ 100 nm
Maximum exposure area: ≥ 40 × 40 mm
Focus depth: ≥ 0.7 μm
Focus maintaining accuracy: ≤ ± 350 nm
Autofocus repeatability: ≤ ± 0.2 μm
Autofocus stability: ≤ ± 0.3 μm
Accuracy of maintaining the projection size: ≤ ± 30 nm
Illumination uniformity over the maximum exposure area: ≤ ± 1.5%
Table positioning accuracy (Stepping Precision): ≥ 70 nm (3sigma)
Lens distortion: ≥ ± 50 nm
Reticle size: 6”
Productivity: ≥ 40 wafers / hour

Other machines similar to Nikon 4425i

1
Location : AMERICA North (USA-Canada-Mexico)
1
Location : AMERICA North (USA-Canada-Mexico)
Year(s) : 2016
1
Location : AMERICA North (USA-Canada-Mexico)
1
Location : AMERICA North (USA-Canada-Mexico)
Year(s) : 2016