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Lam Research, SEZ Spare parts for RST 101

Ref : 2116698-9-FM
Condition : Used
Manufacturer : Lam Research, SEZ
Model : Spare parts for RST 101
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Equipment Details:
Qty / Part number / Description
(2) / 2000615-00 / Sensor pressure switch ISE2
(2) / 2001874-00 / Amplifier, AC motor, mcom-DC-amp-plus
(1) / 2002607-00 / Bearing unit columbus stepper motor
(1) / 2002974-00 / Base, 6" left (Pick and place)
(3) / 2005374-00 / Covers for vacuum channels, 6" (Short for fork)
(2) / 2005589-00 / Card, optocoupler interfaces, 16" / 4+4 Out
(2) / 832-125216-001 / Motors AC servo, M863-8/20
(4) / 2007004-00 / Chucks, 6" with N2 hole, 6 pins, petp covers
(4) / 2012858-00 / Tube carrier-inserts 1/2" for 1 Hex
(2) / RB000004-00 / Spindle for linear tables
(4) / RB000005-00 / Linear guide for linear tables
(6) / 2004990-00 / Board, processors MCOM I1Xa
(6) / 2004994-00 / AB1-MCOM-Z80-00051 - Z80 95
(4) / 2000599-00 / pressure springs VD-052G A2
(1) / 2015432-00 / Motor DC 3557, Gear 5/1, Enc, Linedrv
(2) / 2013555-00 / Sensor exhaust Sigmameltec hPa
(1) / 200656-00 / Encoder HG608KR, m20180002350
(1) / - / Encoder DGS65
(2) / 2003019-01 / Block brakes
(2) / - / Return tube for chambers, Med2, Med3
(1) / - / Power supply 24 V, 27 A
(1) / 2001654-00 / Power supply unit 36 V 8 A
(2) / 2004008-00 / Motor steppers P430-A14
(1) / - / Power supply 12 V, 5 V, 5 V, 13 V
(6) / - / Pressure measurements Mpa
(6) / - / Switches EMO
(3) / 2010013-00 / Control board stepper motors EDM-453
(2) / EB2-RST-VSPAP-INT3 / Front seites pick and place
(2) / 2000522-00 / Card, DIGI PC / 4E (4) Serial quads DB-25
(3) / 2001578-00 / Card, motion controls, variable PWM freq
(1) / 2001036-00 / Card, input 1.0, 2.0 for chemistry system
(4) / 2004025-00 / Controller, stepper motors 1.0 A
(6) / 2000504-00 / Control board stepper motors 30 V 2 A
(5) / - / HEDS5120-A11 Encoder discs
(3) / 2000507-00 / Cards, DC driver 16 out 50 V, 1 A
(3) / 2004991-00 / Z80-Processor interfaces.

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