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SPTS

Ref : 1828108-9-MT
Condition : Used
Manufacturer : SPTS
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
EUROPE (Western and Northern)
Last check : 27 Mar. 2019

SPTS Primaxx Monarch HF Oxide Etcher

– Vapour HF Oxide Etcher
– For Anhydrous HF Gas Etching of Oxide
– Currently Configured for 6”/150mm Wafers
– Capable of processing up to 8”/200mm Wafers
– Semi-Automatic 3-Wafer Loader with Load Lock
– Single Process Chamber
– Integrated Panel PC with on-board electronics minimizes cleanroom footprint