STS MESC Mutiplex ICP
Ref :
2072686-9
Condition :
Used
Manufacturer :
STS
Model :
MESC Mutiplex ICP
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
07 Jan. 2021
STS MESC Multiplex ICP Plasma etcher, 6″ Load lock system Al chamber Dual chlorine gas and BCL3 Injection of gas mixtures: N2, O2, SF6, (C4F8), CF4, BCl3, Ar, Cl2 and HBr Roughing pump Diffusion pump Turbo molecular pump Pumping system: MP, DP and TMP Inductively coupled plasma: RF1 kW RF Generator: 13.56 MHz and 0 to 300 W
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