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STS MESC Mutiplex ICP

Ref : 2072686-9
Condition : Used
Manufacturer : STS
Model : MESC Mutiplex ICP
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 07 Jan. 2021

STS MESC Multiplex ICP Plasma etcher, 6″ Load lock system Al chamber Dual chlorine gas and BCL3 Injection of gas mixtures: N2, O2, SF6, (C4F8), CF4, BCl3, Ar, Cl2 and HBr Roughing pump Diffusion pump Turbo molecular pump Pumping system: MP, DP and TMP Inductively coupled plasma: RF1 kW RF Generator: 13.56 MHz and 0 to 300 W

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