STS MESC Mutiplex ICP

Ref : 2072686-9

Condition : Used

Manufacturer : STS

Model : MESC Mutiplex ICP

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 07 Jan. 2021

STS MESC Multiplex ICP Plasma etcher, 6″ Load lock system Al chamber Dual chlorine gas and BCL3 Injection of gas mixtures: N2, O2, SF6, (C4F8), CF4, BCl3, Ar, Cl2 and HBr Roughing pump Diffusion pump Turbo molecular pump Pumping system: MP, DP and TMP Inductively coupled plasma: RF1 kW RF Generator: 13.56 MHz and 0 to 300 W

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