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Oxford 90 Plus RIE

Ref : 1964377-9-MT
Condition : Used
Manufacturer : Oxford
Model : 90 Plus RIE
Year(s) : 1997
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 30 Jun. 2020

Reactive Ion Etcher Load lock & main process chamber 6 MFCs -(BCl3, Cl2, CH4, H2, Ar, O2),Pfeiffer Turbo TPH330PC on the Main chamber,Pfeiffer Turbo TMH 260C on the Load Lock,Leybold mechanical pumps, PC & monitor.

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