TEL MB2 730 HT HT

System was running production until shut down
In elect rack: 2x Ebara TMP controller (306W), CVD Utility controller
SECS/GEM: YES
CE MARK: YES
Main Frame MBB730 (2 x Wsix Deposition chambers)
Maintenance Table
UI-Rack
Additional breaker box
MBB-730 Main Power Distribution
Power Rack
Edwards dual GRC, D150 qty 2
Box with cable/Process kit/manuals
Gases:
N2 (Ox) 4lmin
N2 (Red) 125l/min
Ar 1000 sccm