Canon MPA 500

Auto Feeder: Single, cassette to cassette, backside wafer handling Wafer size: Currently 5" (4" and 3" sizes available) Mask size: Currrently 6" (5" and 4" sizes available) Specifications: Resolution: 1.5µm (positive resist) Depth of focus: > + 6µm (linewidth 1.5µm) Distortion: 3 sigma < 0.5µm Scanning accuracy: < + 1.5% Auto alignment accuracy: LBS AA 3sigma < 0.6µm (HeNe laser beam scan) Throughput (6¡±wafer) > 83 wfs/h (first mask mode) / > 72 wfs/h (LBS AA mode)