Karl Suss MA200CC

Features:
Capable of wafers up to 8"/200mm
Capable of working with wafer masks up to 9" x 9"
Automatic mask aligner
Configured for top side alignment
Ergonomic Cassette plateforms
1000 watt lamp house
Lamp power supply unit CIC1000 LH1000
UV400 Optic (for 365nm & 405nm)
Lamp adapter LH1000/HBO MA8/MA200
Suss 2 Channel light sensor 365/405nm
AL3000 Auto alignment system
DVM8 microscope with motorized objective movement with field expanders
Objective 20x Olympus UMPL FL 20X - working distance 12mm
XRS pre aligner
Large clear field proximity mask holder for 9" corner marks, with 8" exposure area
8" proximity chuck