KLA-Tencor

Ref : 1741810-9-W

Condition : Used

Manufacturer : KLA-Tencor

Model : -

Year(s) : -

Quantity : 0

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 07 Feb. 2024

KLA-Tencor
Model
Aleris 8360
Wafer Size
300mm
Conation Id
811
Configuration
KLA Aleris 8360 SN SN 7271201 Vintage 11/09 Optical System: BBSE: Broad-Band Spectroscopic Ellipsometer WL: 240-900nm - Xenon lamp source, commit spec for film < 10000A SWE: Single Wavelength Ellipsometer 633nm -- HeNe laser source, commit spec for film < 2000A iDesorber Stress Capability  Thin Film Thickness: o Accuracy +/- 1% for oxide 300A~1um o Accuracy +/- 1.5A for oxide

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