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Plasmatherm

Ref : 1888332-9-MT
Condition : Used
Manufacturer : Plasmatherm
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 03 Oct. 2018

Plasmatherm 7300 PECVD

Description:
Plasmatherm PC operated 7000 PECVD system,32" upper & lower electrodes (5) MFCs - MKS 1479A - N2 purge,NF3- 2000sccm,N2-1000sccm,He-5000sccm,NH3-50sccm,SiH4-2000sccm,RF20S power supply w/matching network, PC operated software,208V-60Hz