Semitool 4600L-5-2-E-VT

Substrate Size Up to 380MM
Controller Model PCS 102
Resistivity Monitor YES
Timer Duration 0-3 hours
SRD Configuration Single Stack
Accessories (3) Clamshell carriers for substrates up to 380mm available as an option.
Other Information Throughput: 50-60 substrates per hour depending on process time.
Power Requirements 208 V 20.0 A 50/60 Hz 3 Phase
Exterior Dimensions
Width 40.300 in (102.4 cm)
Depth 47.500 in (120.7 cm)
Height 71.500 in (181.6 cm)
Weight 946 lb (429 kg)