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Ultratech Saturn Spectrum 3e Wafer stepper

Ref : 1739419-9-AW
Condition : Used
Manufacturer : Ultratech
Model : Saturn Spectrum 3e Wafer stepper
Year(s) : 2005
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 13 May. 2020

ULTRATECH Saturn Spectrum 3e Wafer stepper, 4"-8"
Illuminator: 1.2kw
GHI Filter changer
8" Universal chuck
Gold, solder bump process
Resolution (Minimum feature size): = 1750 mW/cm² GHI-Line
Exposure field uniformity:

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