Ultratech Saturn Spectrum 3e Wafer stepper
Ref :
1739419-9-AW
Condition :
Used
Manufacturer :
Ultratech
Model :
Saturn Spectrum 3e Wafer stepper
Year(s) :
2005
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
13 May. 2020
ULTRATECH Saturn Spectrum 3e Wafer stepper, 4"-8"
Illuminator: 1.2kw
GHI Filter changer
8" Universal chuck
Gold, solder bump process
Resolution (Minimum feature size): = 1750 mW/cm² GHI-Line
Exposure field uniformity:
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