ADE, KLA-Tencor MicroSense 6034

Features:
Non-contact
Accurate
Digital display
Wide operating range
ASTM standard
Thickness, TTV
Flatness, Bow and Warp

Specifications:
RANGE Thickness: 0-1000.0 microns, 0-40.00 mils
TTV, Warp, Bow: 0-250.0 microns, 0-10.00 mils
Accuracy: +2.5 microns, 0.1 mils
Precision: 1.3 microns, 0.05 mils (1 sigma)
Resolution: 0.1 micron, 0.01 mils
Wafer Rings Parallelism: 1.3 microns, 0.05 mils
Flatness Precision: 1.3 microns, 0.05 mils
Limits: User settable high and low with front panel LED indication of high or low out of range