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DSS Gemini 820 RIE

Ref : 1964378-9-MT
Condition : Used
Manufacturer : DSS
Model : Gemini 820 RIE
Year(s) : 2007
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 30 Jun. 2020

Manual Load RIE system (non-load lock) 18" Alumiun chamber w/one UV filter viewport, 12" electrode w/dark space shield,water cooled chamber, 6 zone temperature controller, 486 PC controlled with LCD Touch Screen or handheld controler,Upper RF electrode controlled manually or automatic, 500 Watt RF power supply w/matching network,(4) MFCs,Mechanical pump & Chiller, 208, 3 phase, 60 Hz

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