GSI Lumonics Wafermark Sigma

Features:
Cassette to cassette operation
SECS II/GEM Interface
Fonts: SEMI OCR, BC412, and other dot matrix formats available.
Optical alignment over entire wafer size range with no hardware conversion.

Specifications:
Wafer sizes: 4",5", 6", and 8"
Repeatability:+/- um inboth X and Y axes relative to the primary fiducial
Throughput: Up to 240 wph
Laser type: Acousto-optic Q-switched, TEMoo Nd:YLF Diode-pumped laser
Flat field focusing lens
Brooks (PRI) Robot Model: ATM105-2-
Brooks (PRI) Aligner Model: PRE-200
220 V / 22.0 / 50/60 Hz / 1 phase