Karl Suss MA6

Specifications:
For wafers from 2" to 6" or substrates from 3" x 3" up to 6"6"
Fiber optics tube: 2 arm (length 2400mm) with statistically mixed fibers for uniform illumination
Objective axis distance: 40-140mm
Objective 5X Olympus UMPL FL 5x - working distance 20mm
Objective 10X Olympus UMPL FL 10x - Working distance 10.1mm
Objective 20X Olympus UMPL FL 20X - Working distance 12mm
Turret Kit DVM6/8 - Three position turret nosepiece
Microscope light source: 85W/LH1000 with yellow filter