KLA-Tencor SP2
ASIA (North East)
Description:
Power:208VAC, 3W-N
CDA: > 28.3 Nl/min, > 6.6791 kg/cm2Vac:> 28.317 l/min, > -700mm Hg
Chamber
Powder Coat Panels Kit200/300mm Vacuum optionOpticalFilter
Loadport Vacuum300mmDualFIMS
Application
2mmEdgeExclusion
Oblique Incidence Illumination (High / Standard / Low)Normal Incidence Illumination (High / Standard / Low)EnhancedXY Coordinates
IDMSP2
Standard Classification packageLPD-NClassification
LPD-ES classificationGrading and SortingSpatial Filter (20 degree)Spatial Filter (40 degree)Spatial filter (rough films)Spatialfilter(Back)
High Sensitivity Inspect ModeHighThroughputInspectMode
OptionsHaze
HazeNormalization
HazeAnalysis
IC/OEMMfgSurfQualityRecipe
Wafersize. 300mmXYCalibration Waferwithfirst Article
HARDWARECONFIGURATION
Others 5ColorLightTower(RBYGW)
EthernetNFSClient
E84 enabled for OHT & AGV/RGVE87(Based on E39)
GEM/SECS and HSMSE40/ E94/ E90 / E116
Handler SecondaryUI,Phoenix,SP2
Main ComputerIntel®Xeon™CPU3.20GHz
3.5 GB RAM MemoryDVD-ROM
MouseKeyboard3.5"Floppy
NGSapplicationsoftware
FECcomputer
Intel® Pentium® 4 CPU512MBRAMMemory