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Lam Research 9600PTX

Ref : 2116387-9
Condition : Used
Manufacturer : Lam Research
Model : 9600PTX
Year(s) : 1998
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 16 Apr. 2020

Version 200 mm
Wafer Size 8 inch
2 Strip + 2 PTX
Type of Loadlock
AGV Open Cassette
Number of Process Chamber
2 TCP 9600 PTX chamber & 2 Metal Microwave stripper chamber
TM
Alliance 6.0
User Interface
Monitor/Keyboard/Computer
Signal Tower
EMO Push Button
Main Power 208VAC 40A 60Hz 3PH 5-Wire

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