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Lam Research Autoetch 490B

Ref : 2300875-9-CP
Condition : Used
Manufacturer : Lam Research
Model : Autoetch 490B
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Equipment Details:
Plasma etcher, 3"-6"
Currently configured for 6"
Polysilicon: 490
Upgraded TFT Monitor
Maintenance console
With ENI RF Generator
Single wafer processing
Automated microprocessor control
Cassette to cassette wafer processing
Vacuum load lock
Programmable, variable electrode spacing
Endpoint detection
Stand alone / Bulk head mount
No chiller
No pump.

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Year(s) : 2009