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LAM

Ref : 1831738-9
Condition : Used
Manufacturer : LAM
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 08 Jun. 2018

LAM 490 Poly /Nitride Etcher

*Fully automated microprocessor control
*High throughput vacuum load locked
*Programmable, variable electrode spacing
*Endpoint detection
*Can be configured for 3" to 6" wafers
*Bulk head mount configuration
*ENI OEM 6 13.56 MHz
*650W RF Generator. 208 V, 3 Phase, 60 Hz