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Lumonics III, Wafer marking system

Ref : 1927721-9
Condition : Used
Manufacturer : Lumonics
Model : III, Wafer marking system
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 24 Apr. 2020

Brand: Lumonics
Model: III
Wafer marking system

Specification:
used

Features:
PC based system controller
Set up for 200mm wafer operation
Ultra stable diode pump laser
Super soft mark
Specifications:
Wafer size: 200mm, notch
Thickness: 725um
X-Y theta alignment: +/- 100um
Marking speed: >200m/s
Depth: 1 - 5um
Minimum marking line width: < 40um
Typical character size: 0.3-1mm

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