MRC 603 Sputter
AMERICA North (USA-Canada-Mexico)
Three targets 5 in. x 15 in.
Sputter etch capability
Quartz substrate heaters, substrate
Substrate carrier 13 in. x 13 in
Cryo pump and roughing pump.
Temperature adjustable to 400 deg. C
Optional 3 kW 13.56 MHz RF generator 10 kW DC Magnetron power supply adjustable to 850 V and 25A.