MRC 603 Sputter
Ref :
2068114-9-W
Condition :
Used
Manufacturer :
MRC
Model :
603 Sputter
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2020
Features:
Three targets 5 in. x 15 in.
Sputter etch capability
Quartz substrate heaters, substrate
Substrate carrier 13 in. x 13 in
Cryo pump and roughing pump.
Specifications:
Temperature adjustable to 400 deg. C
Optional 3 kW 13.56 MHz RF generator 10 kW DC Magnetron power supply adjustable to 850 V and 25A.
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