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MRC 603 Sputter

Ref : 2068114-9
Condition : Used
Manufacturer : MRC
Model : 603 Sputter
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 24 Apr. 2020

Features:
Three targets 5 in. x 15 in.
Sputter etch capability
Quartz substrate heaters, substrate
Substrate carrier 13 in. x 13 in
Cryo pump and roughing pump.

Specifications:
Temperature adjustable to 400 deg. C
Optional 3 kW 13.56 MHz RF generator 10 kW DC Magnetron power supply adjustable to 850 V and 25A.

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