Menu

Oxford Plasmalab 133

Ref : 2072688-9
Condition : Used
Manufacturer : Oxford
Model : Plasmalab 133
Year(s) : 2006
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 07 Jan. 2021

Configuration:
Supports wafer sizes up to 300mm (330mm Platen)
RIE set up for SiO2 Etch
RF Generator : Advanced Energy RFX 600A ; 600W, 13.56MHz,
Chamber Turbo Pump : Alcatel ATH 400M w/ ACT 600M controller

Other machines similar to Oxford Plasmalab 133

1
Location : AMERICA North (USA-Canada-Mexico)
Year(s) : 2004
1
Location : AMERICA North (USA-Canada-Mexico)
Year(s) : 2003
1
Location : AMERICA North (USA-Canada-Mexico)
1
Location : AMERICA North (USA-Canada-Mexico)
Year(s) : 2004