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Oxford System 133

Ref : 2068603-9
Condition : Used
Manufacturer : Oxford
Model : System 133
Year(s) : 2004
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 07 Jan. 2021

Configuration:
Supports wafer sizes up to 300mm (330mm Platen)
RIE set up for SiO2 Etch
RF Generator: Advanced Energy RFX 600A ; 600W, 13.56MHz,
Chamber Turbo pump: Alcatel ATH 400M w/ ACT 600M controller
Blue color PLC type

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