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Plasmatherm 790

Ref : 2257659-9-FM
Condition : Used
Manufacturer : Plasmatherm
Model : 790
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

- Non load-locked Single Chamber RIE
- Electrode: 240mm diameter
- Max wafer size capable: 8"/200mm
- System setup to process: 2" diameter InP wafers (see details below)
- RFPP 500W RF Generator
- 500W RF Match
- AMN Power Supply
- ION Gauge Controller Type 290
- Leybold 361C Turbo Pump (Qty 1)
- Leybold NT 150/360 Controller
- Spare Leybold NT 150-360 Controller
- MKS 1160B MFCs (gas configuration listed below)
- Neslab Chiller
- Edwards QDP40 Dry Pump (or equivalent)
- Operator Manual and Documentation

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