Suss Delta 80

- Stand alone spin coater module with Hotplate
- For wafers up to 6" (150mm) or substrates up to 4" x 4" (100mm x 100mm)
- Spinner module
- 19" controller
- Operator panel with display
- Stainless steel cabinet
- Process bowl made of polypropylene
- Waste bottle with full sensor
- Chuck indexing.
- Gyrset closed cover coating technology
- Delta 150 Hotplate with 2 - 6" lift pin setup
- Power: 400 VAC 50/60Hz
- Brushless servomotor with resolver
- Max. Speed:
- with Gyrset 8”: 3000 rpm
- with Gyrset 5": 4000 rpm