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Suss MA200
Ref :
2477018-9-W
Condition :
Used
Manufacturer :
Suss
Model :
MA200
Year(s) :
2010
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
- Automatic Mask Aligner
- Top Side Alignment (TSA)
- 4" Vacuum Chuck (inquire for other sizes)
- 5" x 5" Mask Holder (inquire for other sizes)
- Up to 8"/200mm wafer capable
- Cassette to Cassette Operation
- Pre-Aligner: Through and Reflective Sensor
- UV400 High Resolution Optics
- Robot: Genmark GB4
- 1000W Lamp House
- CIC1200 Power Supply
- Wafer Flat Check Camera Option Included
- Ring Field Illumination for TSA Option Included
- Isolation table (included in main body)
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