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Suss MA200

Ref : 2477018-9-W
Condition : Used
Manufacturer : Suss
Model : MA200
Year(s) : 2010
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

- Automatic Mask Aligner
- Top Side Alignment (TSA)
- 4" Vacuum Chuck (inquire for other sizes)
- 5" x 5" Mask Holder (inquire for other sizes)
- Up to 8"/200mm wafer capable
- Cassette to Cassette Operation
- Pre-Aligner: Through and Reflective Sensor
- UV400 High Resolution Optics
- Robot: Genmark GB4
- 1000W Lamp House
- CIC1200 Power Supply
- Wafer Flat Check Camera Option Included
- Ring Field Illumination for TSA Option Included
- Isolation table (included in main body)

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