Varian EHPi220

Ref : 2734008-9-CP

Condition : Used

Manufacturer : Varian

Model : EHPi220

Year(s) : 2001

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

• Version: 200 mm SMIF
• Status: In cleanroom, idled
• Condition: As is where is
• Platen: Needs re-installation after refurbishment
• TPLM board: Missing from main computer
• System type: Through the wall
• Loading ports: Dual 200 mm SMIF (Brooks type)
• Power: 3 Phase 208V
• Frequency: 50/60 Hz
• UPS: Included
• Maximum beam energy: 200 KV
• Gas box: 4 sticks, HP and SDS2 in use
• Pumps: CTI Cryo, Onboard 4F

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