Brumley South SST-1200
AMERICA North (USA-Canada-Mexico)
Sphere Size Range:PSL Sphere diameters of 20nm to 4.0 um
Substrate Sizes:100, 125, 150, 200 and 300mm wafers, PhotoMask, LCD panels.
Deposition Time: Variable, user selectable.
Wafer to Wafer Repeatability: < 7 % after setup.
Clean/Purge Time:Average time 30 seconds into HEPA exhaust filter.