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Canon MPA 600FA

Ref : 2074980-9
Condition : Used
Manufacturer : Canon
Model : MPA 600FA
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 24 Apr. 2020

Features:
Autofeeder: single, cassette to cassette
Backside wafer handling

Specifications:
Illumination: 2kW high pressure mercury lamp
Intensity: > 600mW / cm2 (6 inch wafer)
Illumination uniformity: ± 3%
Resolution: 1.5µm
Depth of focus: > + 6µ (line width: 1.5µm)
Magnification: < 0.4µm
Distortion: 3 sigma < 0.5µm
Scanning accuracy: < 1.5%
Auto-alignment accuracy: LBS AA 3 sigma < 0.6µm (HeNe laser beam scan)

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