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Sigma FxP200 RevA
Ref :
2740819-9-CP
Condition :
Used
Manufacturer :
-
Model :
Sigma FxP200 RevA
Year(s) :
1999
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Trikon/SPTS PVD Tool
Wafer Size Range
Minimum 200 mm
Maximum 200 mm
Set Size 200 mm
Accessories
Brooks MX800 Platform with 2 VCE6 Loadlocks,
4 Std. RevA DEP, 1 RevA HSE, 1 MKII Heat.
2CTI 9600 HV Cryo Compressor
Other Information
Brooks MKII Platform upgradet to SPTS GTM PC104
Condition Good
Year of Manufacture 1999
Power Requirements 380 V 50 Hz 3 Phase
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