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Applied Materials P5000 PECVD & Etch Back

Ref : 2164749-9
Condition : Used
Manufacturer : Applied Materials
Model : P5000 PECVD & Etch Back
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Applied Materials (AMAT) P5000 PECVD & Etch Back
-Wafer Size 150mm
-Includes Hot Box, with Ampules
-Fully populated gas panel
-Processes (oxide, nitride, teos, sih4)
-Includes vacuum pumps, dry type, ebara
-Includes AMAT heat exchanger
-Includes Neslab chiller
-Includes Ozone Generator
-Includes Remote Frame with Qty 3 ENI OEM RF generators

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