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ESC ELAS

Ref : 1964385-9-MT
Condition : Used
Manufacturer : ESC
Model : ELAS
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 30 Jun. 2020

Sputter down cassette to cassette PVD system,standard Brooks robot system,CTI 10-inch cryo pump on main chamber,CTI 8-inch cryo on Load Lock, turbo pump or rotary pump available, Advanced Energy Pinnacle DC Magnetron Power Supply,Advanced Energy RFPP RF20S Power Supply,Techware II Ultra 3 targets (20.25" x 4.75")plus RF etch station (as standard),Dual level load lock,Bulkhead (through-wall) mounting Maximum Substrate Size:Large area substrates up to 400mm X 420mm,Batch Size:4 x 200mm wafers, 6 x 150mm wafers, system ver similar to a MRC 943 PVD system

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