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KLA-Tencor Surfscan 6200

Ref : 2259550-9-FM
Condition : Used
Manufacturer : KLA-Tencor
Model : Surfscan 6200
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 24 Feb. 2021

- Bare Wafer Surface Defect Inspection System
- Fully Refurbished with a six month warranty
- Max Wafer Capable: 8”/200mm
- System configured for 8“/200mm wafers
- Defect Sensitivity: 0.12um
- Defect Map and Histogram with Zoom
- Haze Map and Histogram with Zoom
- Argon Ion Laser (488nm)
- 2D Signal Integration
- Software:
+ Microsoft Windows 98, Version 4.2
+ Software Enhancement
+ Computer Upgrade
- Pentium Computer
- Software Capable for Wafer Map and Histogram
- Parallel Printer Port
- Blower Box
- SECS II Communication Port
- Operations Manual and Documentation

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