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Anelva C-7100GT PCM-PVD Sputtering system

Ref : 1772816-9-MT
Condition : Used
Manufacturer : Anelva
Model : C-7100GT PCM-PVD Sputtering system
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 30 Jun. 2020

Anelva C-7100GT PCM-PVD Sputtering system EFEM RS7000 Load Port with (2) Load Locks - A & B 300mm FOUP Chamber A - Anneal (850C max) Brooks transfer Chamber with Mag7 robot Chamber C - High Rate PCM-PVD module co-sputter with 2 PVD targets (DC/RF), 5KW DC power supply, 13.56MHz - 2KW RF power supply, 3KW match box, 3200L/sec TMP. Chamber E- High Rate PCM-PVD module co-sputter with 2 PVD targets (DC/RF), 5KW DC power supply, 13.56MHz - 2KW RF power supply, 3KW match box, 3200L/sec TMPChamber F - Aligner

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