Karl Suss MJB3-IR
United States (USA)
Mask Aligner with Backside and Topside Alignment Capabilities. The scanning backside alignment is accomplished using an IR camera which detects infrared light transmitted through an IR transparent chuck, as well as the substrate and mask being aligned. Olympus microscope. The alignment microscope uses 5X, 10X, 20X and 50X objective lenses for either backside or topside alignment. For topside alignment the eyepieces are 10X. The exposure source is a 350W Hg lamp powered by a Suss Model CIC 500. The system incorporates UV-400 optics to transfer the energy to the substrate. The substrate may be exposed in soft or hard contact with both forms of alignment. Also in topside alignment the vacuum contact (high precision“HP”) is available. Wavelength: 365nm, 405nm. 115-230V, 50/60 Hz. Very Nice Condition.