LAM TCP 9600SE
Ref :
2019408-9-GO
Condition :
Used
Manufacturer :
LAM
Model :
TCP 9600SE
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
26 Nov. 2019
Standard recipe600/601 for AI etching:
Etch rate: 800 nm/min,
Photoresist etch rate:400nm/min,
Standard recipe 640 for AI203 etching:
Etch rate: 100-120nm/min
Substrate size:
150 mm diameter
Allowed Materials:
AI, AI203, Ti02, poly Si, Nb and a variety of nitrides may be etched using CI-chemistry
Forbidden Materials:
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