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Nikon NSR-S620D

Ref : 2298056-9
Condition : Used
Manufacturer : Nikon
Model : NSR-S620D
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Equipment crated and stored in warehouse.
Resolution ≦ 38 nm
NA 1.35
Reduction ratio 1:4
Maximum exposure field 26 × 33 mm
Overlay ≦ 3 nm
Throughput ≧ 180 wafers/hour (300 mm wafer, 125 shots)

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