Plasmatherm SLR-730

- Dual Chamber System
- Load Locked
- Max Wafer Size: 8"/200mm
- Carrier plates (2) included
- Edwards IQDP80 Vacuum Pump with Blower (chamber)
- Varian Scroll Vacuum Pump (Load Lock)
- Neslab HX-75 Chiller
- Electrical Breaker Box
- 2 EMO Buttons (1 front & 1 Rear)
- RFPP Model RF5S RF generator (13.56 Mhz, 500 Watt RF generator)
- Substrate max temperature: 350 degrees C
- Plasmatherm Temperature Controller
- Plasmatherm Power Controller
- Operations Manuals (complete set)
- Power: 208V, 3PH, 60Hz
- System Dims: 68"x50"x80" (LxWxH)