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SPTS LPX APS

Ref : 2259524-9-FM
Condition : Used
Manufacturer : SPTS
Model : LPX APS
Year(s) : 2014
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

- Process Chamber: APS PM
- APS PM chamber: Low Pressure, High Density Plasma for etching strongly bonded materials including; SiC/GaN, Oxide & Nitride, Deep Oxide, Glasses, Sapphire, PZT/Pt
- Current Process: SiC & GaN etch
- Windows based control software
- Max wafer size capable: 200mm
- LPX Single Wafer Load Lock

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