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Ulvac 200MM

Ref : 2096383-9
Condition : Used
Manufacturer : Ulvac
Model : 200MM
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 07 Jan. 2021

OPERATIONAL WHEN REMOVED FROM SERVICE
INCLUDES BROOKS ENTRANCE AND TRANSFER LOAD LOCKS.
RIE (RF) and/or DOWNSTREAM OPERATION (MICROWAVE)
EXCELLENT FOR REMOVAL OF HIGH DOSE IMPLANT or POST VIA ETCH
6 Mass Flow Controllers, PUMPS NOT INCLUDED

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