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Ulvac XeF2

Ref : 2016121-9-GO
Condition : Used
Manufacturer : Ulvac
Model : XeF2
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 26 Nov. 2019

RF Power supply.
Voltage: 208V
Frequency: 60Hz
Phase, Wire: 3Phase, 3Wire+ G Line
Full Load Current: 142A
Max Load (Unit): 15.5A
Over Current Protective: 250A
Short Circuit Current Rating: 5Ka

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