Varian 3190

Specifications:
Load locked single wafer sputter, cassette to cassette vertically mounted for sideways sputter
3 Sputter Stations (Conmag I Sources)
Substrate heaters
1 RF Etching Station
MKS 250 Controllers
FLUKE 1722A Controllers
Wafer Process Controller
Wafer Loader Controller
Vacuum System Controller
845 Ionization Gauge Controller
RF Matching Controller
Cassette Motor Controller
Wide Range Thin Film Monitor