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KLA-Tencor AIT I Patterned

Ref : 2331850-9-FM
Condition : Used
Manufacturer : KLA-Tencor
Model : AIT I Patterned
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Max Wafer: 150mm
System Dimensions:
74x43x76
Weight: 2754 lbs
- Currently Configured for 6"/150mm & 8"/200mm Wafers
- Double Darkfield Inspection Tool
- SECS II/GEM Communication Interface
- Low Contact Chuck (AIT I)
- Multi Channel Collection Optics System with Independent Programmable Spatial Filters
- Pentium CPU with Windows NT Installed
- Wafer Transfer Area Housing Cover
- Wafer Handling Module
- High Voltage Electronics
- Front and Rear EMO’s with Covers
- Flat Panel Display for AIT
- Fold Down Keyboard Tray with Built In Mouse
- X/Y Drive/Controller Chassis and Motion Controller Card
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation

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