KLA-Tencor SP1 Classic

Ref : 2111359-9
Condition : Used
Manufacturer : KLA-Tencor
Model : SP1 Classic
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 24 Apr. 2020


300/200mm wafers Dual Dark Field Collection Channels 0.079um Defect Sensitivity 0.001 ppm Haze Sensitivity Argon Ion Laser (488nm) Measurement Chamber with ULPA Filter and Blower Unit Operator Interface : MS Windows NT 4.0 OS, Ver 3.2 Software Interactive Pointing Device, Keypad controls TFT Flat Panel Display Parallel Printer Port Defect Map and Histogram with Zoom Micro View Measurement Capability Clear Side Panels for Wafer Environment Protection Cassette Size recognition Ulpa Filter and Blower Unit for Wide Handling Module for class 1 Feature X-Y Coordinates System refurbished to meet OEM Specification and Calibrated System is completely refurbished, calibrated and set up to run 8" wafer.

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