Rigaku

RIGAKU 3640 Xray Fluorescence Wafer/Disk Analyzer

Date of Manufacture: March, 2000
Channels Include: B, P, Si, Pt, N, Al, Ti, Cu, W & Scanning Channel
Toshiba Analix AFX-87L-Rh X-Ray Tube
Rhenium Target Material
Input Voltage: 75kV
Input Power: 4kW
High Voltage Transformer – Model 6703-9002CS
Heat Exchanger
MECS UTX 1000 3 Axis Robot
Includes Stainless Steel Robot Alignment Fixtures
MECS TTX 1000 Robot Controller
Includes 2ea MECS CS-1000 Control Systems (Onboard & Remote)
MECS OF250 Wafer Orienter with Controller
MKS Type 250 Controller
MKS Type 113 Power Supply Readout
MKS Model 627 Baratron Head
Edwards iL70 Dry Vacuum Pump
System Control PC